Ellipsometer

Ellipsometer

Description:

Measure the thickness, refractive index and some other parameters of transparent thin-film like SiO, SiO₂ and some metal thin-film

Specifications:

·         Laser wavelength: 633nm

·         Angle:  0-90°

·         Thickness error measured: 2nm

·         Manufacturer: MTA-KFKI, Hungary

·         Year of manufacture: 1994, installation and use: 1995

Code name: ATKI

Contact: Nguyen Van Toan

Key words: Ellipsometer, ATKI, MTA-KFKI, Hungary