Centrifugal system coating SOG
Description:
Grow thin film from silicate compounds, organic silicon compounds or substances as sources doped on silicon slab in microelectronics technology
Specification:
Rotation speed: 50-1000 rpm
Time and rate controlled by program
Manufacturer: SEMITEC, Germany
Year of manufacture: 1996, installation and use: 1997
Code name: CPS 20
Contact: Nguyen Van Toan
Key words: Centrifugal system coating SO, CPS 20, SEMITEC, Germany
