Sputtering system
Description:
- Grow single and multilayer thin film from many original materials
Specifications:
- Quartz lamp is used to dry sample before growth
- Maximum vacuum: 3.10-7 Torr, turbo pump, 2 sputtering guns, 1 rotating substrate (heated by halogen lamp upto 450ºC), 1 high frequency source 500W, 1 DC source 750W
Contact: Nguyen Van Toan
Key words: sputtering system, Quartz lamp, sputtering guns
